AMT Series 266nm Industrial Deep UV Picosecond Laser
Description & Introduction
The AMT Series Industrial Deep UV Picosecond Laser delivers world-leading 266nm fourth-harmonic frequency conversion technology, providing exceptional stability and precision for advanced micro-processing applications.
Featuring reliable power stability (<3%), superior beam quality (M² <1.3), and outstanding beam circularity (>90%), the AMT series ensures high-precision deep UV processing with maximum output power exceeding 3W. The advanced frequency conversion switching technology maintains consistent beam quality, beam size, and pointing stability after switching, significantly improving long-term operational reliability.
The AMT-266 picosecond laser integrates self-developed core modules, including an ultra-fast seed source and high-temperature nonlinear crystal oven, ensuring long service life (single point lifetime >1000 hours; system lifetime >20,000 hours). The built-in air cleaning system maintains cavity cleanliness and extends crystal lifespan.
Supporting SYNC synchronous output, edge triggering, and level triggering control modes, with integrated power monitoring, the AMT Series is ideal for sapphire GaN lift-off, carbon-free cold processing, glass grain separation, chip defect inspection (28nm and below nodes), optical component surface inspection, polymer cutting, and high-density data storage.
The AMT Series represents the perfect combination of precision, stability, and deep UV performance.
Specifications
High Frequency AMT-266
| Specification | 0.5W-120M | 1.5W-120M | 3W-70M | 5W-70M |
| Central Wavelength (nm) | 266.08 ± 0.1 | |||
| Linewidth (pm; FWHM) | ≤20 | |||
| Output Power (W) | ≥0.5 | ≥1.5 | ≥3 | ≥5 |
| Repetition Rate (kHz) | ≥120 | ≥70 | ||
| Power Adjustment Range (%) | 90%-100% | 1%-100% | ||
| Output Power Stability (PV) | ≤0.5% @8h | |||
| RMS Noise | <1% rms (<3 MHz) | |||
| Beam Quality (M²) | ≤1.2 | |||
| Output Beam Waist Diameter & Position | 1.8mm ±10%, waist distance from output +/-2m | |||
| Ellipticity | ≥90% | |||
| Polarization | 100:1 Linear, Horizontal | |||
| Pulse-to-Pulse Intensity Variation (PV) | ≤5% | |||
| Pointing Stability after Replacement (urad) | ≤100 | |||
| Temperature Coefficient (urad/K) | <20 | |||
| Power Supply (V) | DC24V | |||
| Total Power / Consumption (W) | <250 | <450 | <800 | |
| Operating Temperature (°C) | 20-25 | |||
| Cooling Method | Water Cooling | |||
| Cooling Capacity Requirement | 300W | 500W | 1000W | |
| Power Monitoring | Internal PD | |||
| Lifetime (h) | ≥10000, single point ≥500 | |||
| Manual / Auto Replacement | Auto replacement | |||
Low Frequency AMT-266
| Specification | 1W-10K | 3W-100K |
| Wavelength (nm) | 266 | |
| Average Power (Watts) | >1 | >3W |
| Pulse Energy (μJ) | >130 | >30 |
| Specified Frequency (kHz) | 10 kHz | 100 kHz |
| Repetition Rate (kHz) | Single Shot-30 kHz | Single Shot-300 kHz |
| Pulse Width (ps) | <30 | |
| Beam Quality (M²) | <1.3 | |
| Beam Roundness (%) | >85 | |
| Beam Diameter (mm) | ~1.8 ±10% | |
| Divergence (mRad) | 0.3 ±10% | |
| Pointing Stability (μrad/°C) | <20 | |
| Polarization | 100:1 Linear, Horizontal | |
| Pulse-to-Pulse Stability (% RMS) | <3 | |
| Average Power Stability (% over 12 hours) | <3 | |
| Warm-up Time (mins) | <60 | |
| Standby Warm-up (mins) | <10 | |
| Operating Temperature (°C) | 15-35 | |
| Operating Humidity (%) | 20 to 80, Non-condensing | |
| Storage Temperature (°C) | -20 to 50 | |
| Storage Humidity (%) | 20 to 80, Non-condensing | |
| Power Supply (VDC/Watts) | 24 / 600 | |
| Communication Protocol | RS232 | |
| Cooling Method | Water | |
| Weight (kg) | 55 | |











