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AMT Series 266nm Industrial Deep UV Picosecond Laser

Short Description:

Industrial 266nm deep UV picosecond laser with <3% power stability, M² <1.3 beam quality, SYNC output, and 3W power. Ideal for chip inspection, GaN separation, and precision micromachining.


  • Unit Price: Negotiable
  • Terms of Payment: 100% in Advance
  • Payment Method: T/T, Paypal, Credit Card...
  • Country of Origin: China
  • Product Detail

    Product Tags

    Description & Introduction

    The AMT Series Industrial Deep UV Picosecond Laser delivers world-leading 266nm fourth-harmonic frequency conversion technology, providing exceptional stability and precision for advanced micro-processing applications.

    Featuring reliable power stability (<3%), superior beam quality (M² <1.3), and outstanding beam circularity (>90%), the AMT series ensures high-precision deep UV processing with maximum output power exceeding 3W. The advanced frequency conversion switching technology maintains consistent beam quality, beam size, and pointing stability after switching, significantly improving long-term operational reliability.

    The AMT-266 picosecond laser integrates self-developed core modules, including an ultra-fast seed source and high-temperature nonlinear crystal oven, ensuring long service life (single point lifetime >1000 hours; system lifetime >20,000 hours). The built-in air cleaning system maintains cavity cleanliness and extends crystal lifespan.

    Supporting SYNC synchronous output, edge triggering, and level triggering control modes, with integrated power monitoring, the AMT Series is ideal for sapphire GaN lift-off, carbon-free cold processing, glass grain separation, chip defect inspection (28nm and below nodes), optical component surface inspection, polymer cutting, and high-density data storage.

    The AMT Series represents the perfect combination of precision, stability, and deep UV performance.

    Specifications

    High Frequency AMT-266

    Specification 0.5W-120M 1.5W-120M 3W-70M 5W-70M
    Central Wavelength (nm) 266.08 ± 0.1
    Linewidth (pm; FWHM) ≤20
    Output Power (W) ≥0.5 ≥1.5 ≥3 ≥5
    Repetition Rate (kHz) ≥120 ≥70
    Power Adjustment Range (%) 90%-100% 1%-100%
    Output Power Stability (PV) ≤0.5% @8h
    RMS Noise <1% rms (<3 MHz)
    Beam Quality (M²) ≤1.2
    Output Beam Waist Diameter & Position 1.8mm ±10%, waist distance from output +/-2m
    Ellipticity ≥90%
    Polarization 100:1 Linear, Horizontal
    Pulse-to-Pulse Intensity Variation (PV) ≤5%
    Pointing Stability after Replacement (urad) ≤100
    Temperature Coefficient (urad/K) <20
    Power Supply (V) DC24V
    Total Power / Consumption (W) <250 <450 <800
    Operating Temperature (°C) 20-25
    Cooling Method Water Cooling
    Cooling Capacity Requirement 300W 500W 1000W
    Power Monitoring Internal PD
    Lifetime (h) ≥10000, single point ≥500
    Manual / Auto Replacement Auto replacement

     

    Low Frequency AMT-266

    Specification 1W-10K 3W-100K
    Wavelength (nm) 266
    Average Power (Watts) >1 >3W
    Pulse Energy (μJ) >130 >30
    Specified Frequency (kHz) 10 kHz 100 kHz
    Repetition Rate (kHz) Single Shot-30 kHz Single Shot-300 kHz
    Pulse Width (ps) <30
    Beam Quality (M²) <1.3
    Beam Roundness (%) >85
    Beam Diameter (mm) ~1.8 ±10%
    Divergence (mRad) 0.3 ±10%
    Pointing Stability (μrad/°C) <20
    Polarization 100:1 Linear, Horizontal
    Pulse-to-Pulse Stability (% RMS) <3
    Average Power Stability (% over 12 hours) <3
    Warm-up Time (mins) <60
    Standby Warm-up (mins) <10
    Operating Temperature (°C) 15-35
    Operating Humidity (%) 20 to 80, Non-condensing
    Storage Temperature (°C) -20 to 50
    Storage Humidity (%) 20 to 80, Non-condensing
    Power Supply (VDC/Watts) 24 / 600
    Communication Protocol RS232
    Cooling Method Water
    Weight (kg) 55

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